Low Temperature Evaporator for Temperature Sensitive Materials and Thermal Evaporator for Metals
The second evaporator system will be used for the deposition of temperature sensitive materials and metals. Two sources of evaporation will be used, one low temperature for organic materials, sulfides and other compounds which are temperature sensitive and one thermal evaporator for metals allowing the continuous deposition of multiple organic / inorganic layers without breaking the vacuum.
Some Key features of the tool:
- Organic materials: Fullerenes, Teflon and other low-surface energy polymers or oligomers, C60, other temperature sensitive materials, using a low temperature evaporation source.
- Sulfides and other Compounds: MoS2, WS2, Sb2S3, Bi2S3, SnS2, ZnS, MoTe2, MoSe2
- Metals such as Al using a thermal evaporation source
- The system will be designed with the capability to install in the future a sputtering source for dielectrics
- Thicknesses from 5-500nm in a single growth run.
- Uniformity at least ±5% across a 4-inch wafers.
- Base pressure better than 7×10-7 Torr.
